{"id":4533,"date":"2024-12-22T19:48:15","date_gmt":"2024-12-22T15:48:15","guid":{"rendered":"https:\/\/iss-lab.com\/?page_id=4533"},"modified":"2024-12-22T19:48:17","modified_gmt":"2024-12-22T15:48:17","slug":"transpector-cpm-3-mass-spectrometer","status":"publish","type":"page","link":"https:\/\/iss-lab.com\/index.php\/transpector-cpm-3-mass-spectrometer\/","title":{"rendered":"Transpector\u00ae CPM 3 Mass Spectrometer"},"content":{"rendered":"\n<p class=\"has-medium-font-size\"><strong>Fast, Field-Ready Process Monitoring System<\/strong><\/p>\n\n\n\n<div class=\"wp-block-media-text has-media-on-the-right is-stacked-on-mobile\" style=\"grid-template-columns:auto 66%\"><div class=\"wp-block-media-text__content\">\n<p><\/p>\n<\/div><figure class=\"wp-block-media-text__media\"><img loading=\"lazy\" decoding=\"async\" width=\"500\" height=\"335\" src=\"https:\/\/iss-lab.com\/wp-content\/uploads\/2024\/12\/image-315.png\" alt=\"\" class=\"wp-image-4534 size-full\" srcset=\"https:\/\/iss-lab.com\/wp-content\/uploads\/2024\/12\/image-315.png 500w, https:\/\/iss-lab.com\/wp-content\/uploads\/2024\/12\/image-315-300x201.png 300w\" sizes=\"(max-width: 500px) 100vw, 500px\" \/><\/figure><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">Performance, Reliability, and Versatility<\/h2>\n\n\n\n<p>INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.<\/p>\n\n\n\n<p>Transpector CPM 3 provides proven return on investment to our partners through:<\/p>\n\n\n\n<ul>\n<li>Industry Leading Measurement Technology<\/li>\n\n\n\n<li>Robust and Adaptive Architecture<\/li>\n\n\n\n<li>Ease of Maintenance<\/li>\n\n\n\n<li>Superior Product Support<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">Features<\/h2>\n\n\n\n<ul>\n<li>Residual Gas Analyzer for ALD, Etch, CVD and 300 mm Degas\u2014enables real-time process monitoring and analysis<\/li>\n\n\n\n<li>ALD-Ready with 1.8 ms per point (555 points per second) measurement speed<\/li>\n\n\n\n<li>Field-proven durability and reliability in the most demanding CVD and Etch applications<\/li>\n\n\n\n<li>Application Integration\u2014Transpector CPM becomes a powerful process monitoring and diagnostics tool when integrated with FabGuard software and supported by INFICON world-class applications experts<\/li>\n\n\n\n<li>Compact size\u2014allows for easy integration into production semiconductor equipment<\/li>\n\n\n\n<li>Hexblock\u2122 with up to three pressure inlets and reduced surface area to minimize surface reactions and response times<\/li>\n\n\n\n<li>Capacitance Diaphragm Gauge (CDG)\u2014CDG allows user to monitor the process pressure and automatically protect the system from pressure excursions<\/li>\n\n\n\n<li>Automated calibration\u2014ensures long-term data stability and accuracy for sensor to sensor and tool to tool chamber matching<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">Brochures &amp; Data Sheets<\/h2>\n\n\n\n<p class=\"has-medium-font-size\"><strong><a href=\"https:\/\/www.inficon.com\/media\/5334\/download\/Transpector-CPM-3-Brochure.pdf?v=1&amp;inline=true&amp;language=en\" target=\"_blank\" rel=\"noreferrer noopener\">Transpector\u00ae CPM Fast, Field-ready Process Monitoring System<\/a><\/strong> Brochure<\/p>\n\n\n\n<div class=\"wp-block-buttons alignwide is-content-justification-left is-layout-flex wp-container-core-buttons-is-layout-1 wp-block-buttons-is-layout-flex\">\n<div class=\"wp-block-button has-custom-width wp-block-button__width-25 is-style-outline\"><a class=\"wp-block-button__link wp-element-button\" href=\"https:\/\/www.inficon.com\/en\/products\/gas-analysis\/transpector-cpm-3\" target=\"_blank\" rel=\"noreferrer noopener\"><strong><em>More Information<\/em><\/strong><\/a><\/div>\n\n\n\n<div class=\"wp-block-button is-style-outline\"><a class=\"wp-block-button__link wp-element-button\" href=\"https:\/\/iss-lab.com\/?page_id=3478\"><em><strong>Mass Spectrometers<\/strong> <strong>Page<\/strong><\/em><\/a><\/div>\n\n\n\n<div class=\"wp-block-button is-style-outline\"><a class=\"wp-block-button__link wp-element-button\" href=\"https:\/\/iss-lab.com\/index.php\/leak-detection\/\" target=\"_blank\" rel=\"noreferrer noopener\"><strong><em>Leak Detection Page<\/em><\/strong><\/a><\/div>\n\n\n\n<div class=\"wp-block-button is-style-outline\"><a class=\"wp-block-button__link wp-element-button\" href=\"https:\/\/iss-lab.com\/index.php\/products-technologies\/\" target=\"_blank\" rel=\"noreferrer noopener\"><strong><em>Products &amp; Technologies Page<\/em><\/strong><\/a><\/div>\n\n\n\n<div class=\"wp-block-button has-custom-width wp-block-button__width-25 is-style-outline\"><a class=\"wp-block-button__link wp-element-button\" href=\"https:\/\/iss-lab.com\/\"><strong><em>Home Page<\/em><\/strong><\/a><\/div>\n\n\n\n<div class=\"wp-block-button is-style-outline\"><a class=\"wp-block-button__link wp-element-button\" href=\"https:\/\/iss-lab.com\/index.php\/contact-us\/\" target=\"_blank\" rel=\"noreferrer noopener\"><strong><em>Contact us<\/em><\/strong><\/a><\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>Fast, Field-Ready Process Monitoring System Performance, Reliability, and Versatility INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor [&hellip;]<\/p>\n","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_mi_skip_tracking":false,"_monsterinsights_sitenote_active":false,"_monsterinsights_sitenote_note":"","_monsterinsights_sitenote_category":0,"footnotes":""},"_links":{"self":[{"href":"https:\/\/iss-lab.com\/index.php\/wp-json\/wp\/v2\/pages\/4533"}],"collection":[{"href":"https:\/\/iss-lab.com\/index.php\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/iss-lab.com\/index.php\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/iss-lab.com\/index.php\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/iss-lab.com\/index.php\/wp-json\/wp\/v2\/comments?post=4533"}],"version-history":[{"count":1,"href":"https:\/\/iss-lab.com\/index.php\/wp-json\/wp\/v2\/pages\/4533\/revisions"}],"predecessor-version":[{"id":4535,"href":"https:\/\/iss-lab.com\/index.php\/wp-json\/wp\/v2\/pages\/4533\/revisions\/4535"}],"wp:attachment":[{"href":"https:\/\/iss-lab.com\/index.php\/wp-json\/wp\/v2\/media?parent=4533"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}