{"id":4699,"date":"2024-12-23T19:54:54","date_gmt":"2024-12-23T15:54:54","guid":{"rendered":"https:\/\/iss-lab.com\/?page_id=4699"},"modified":"2024-12-23T19:54:55","modified_gmt":"2024-12-23T15:54:55","slug":"ald-sensor","status":"publish","type":"page","link":"https:\/\/iss-lab.com\/index.php\/ald-sensor\/","title":{"rendered":"ALD Sensor"},"content":{"rendered":"\n

Optimum Accuracy, maximal Uptime and Minimal Maintenance<\/strong><\/p>\n\n\n\n

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INFICON ALD Sensors bring the repeatability, precision, and durability of quartz crystal microbalance (QCM) measurement to atomic layer deposition (ALD). The ALD Sensor can withstand temperatures up to 450\u00baC, and is designed to operate in the harsh environment of an ALD application. The exposed crystal electrode is fully grounded to effectively eliminate any potential issues with electrical interference.<\/p>\n<\/div>

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Designed Specifically for ALD<\/strong><\/h2>\n\n\n\n

A unique feature of the INFICON ALD Sensor is a gas tube used to purge the back of the crystal and sensor cavity with an inert gas, typically nitrogen. This keeps reactive chamber gases from entering the sensor head and keeps the back of the crystal and electrical contacts free of deposition material. This technique allows for in situ measurement in systems where a standard QCM is not suitable.<\/p>\n\n\n\n

Feedthrough and Feedthrough Connection<\/strong><\/h2>\n\n\n\n

INFICON ALD Sensors are available in custom welded lengths or with compression fittings for adjustable length without the need for brazing or welding. All configurations use a 2 \u00be in. (CF40) ConFlat\u00ae flange feedthrough.<\/p>\n\n\n\n

High Temperature Crystals for More Accurate Measurements<\/strong><\/h2>\n\n\n\n

The INFICON ALD Sensor can achieve the best measurement accuracy and lower frequency noise in high temperature applications when used with INFICON\u2019s new high temperature quartz crystals. These high temperature crystals are optimized for 120, 240, and 285\u00b0C applications, so you always have the right crystal for your process. Crystals optimized for other temperatures may be available. Contact INFICON for your needs.<\/p>\n\n\n\n

Features<\/h2>\n\n\n\n