Mass Spectrometers

Transpector APX Multi-Pressure
Mass Spectrometers

Advanced process expert for Multi-Pressure ALD/CVD and Etch.

• xParts coated for extended lifetime in harsh chemistry
• Multi pressure sampling inlet
• Detection limit below 10 ppb
• Industry leading pumping speed

Transpector® APX ALD Single Pressure
Mass Spectrometers

Advanced process expert for Single Pressure ALD/CVD and Etch.

• xParts coated for extended lifetime in harsh chemistry
• High temperature single pressure inlet
• Detection limit below 10 ppb
• Industry leading pumping speed

Transpector® XPR 3+
Mass Spectrometers

Extreme PVD Process Monitoring Quadrupole Mass Spectrometer.

• Industry leading maximum operating pressure
• Optional overpressure isolation valve interlock
• Scans up to 100 amu

Transpector® MPH
Mass Spectrometers

High performance quadrupole mass spectrometer.

• Nine-decade dynamic range
• Industry leading data collection rate
• Interchangeable sensors and electronics
• Scans up to 300 amu

Transpector® MPS
Mass Spectrometers

Multi-Purpose Quadrupole Mass Spectrometer.

• Nine-decade dynamic range
• Interchangeable sensors and electronics
• Optional continuous dynode electron multiplier
• Scans up to 200 amu

Transpector® CPM 3
Mass Spectrometers

Versatile process monitoring from baseline to process pressure.

• Ideal semiconductor process monitor
• Multi pressure sampling inlet
• Detection limit below 1 ppm
• Integrated differential pumping

Transpector® CPX
Mass Spectrometers

Compact Process Expert for Advanced Process Monitoring.

• Optional Dual filament closed ion source for increased lifetime
• HexBlock multi-pressure sampling inlet
• Detection limit below 200 ppb
• Industry leading pumping speed
• 30% decrease in system volume

Transpector® SPS
Mass Spectrometers

Process monitoring at target pressure range.

• Targeted high pressure processes
• Single pressure sampling inlet
• Detection limit below 1 ppm
• Integrated differential pumping system

QMG 700
Mass Spectrometers

QMG 700 Analytical Mass Spectrometer to break through detection barriers and propel your process to the next level of innovation.

• Mass range options from 1-512 amu
• More than nine decades of dynamic range
• Extremely fast measurement speeds: 0.125 ms/amu
• MDPP < 10E-16 mbar

Mobile Cart for Transpector® CPM
Mass Spectrometers

Allows the Transpector CPM to become a mobile troubleshooting instrument.

• Flexible enough to get a Transpector CPM where you need it
• A small footprint to fit in those tight spaces
• A complete system able to hold everything needed to run the Transpector CPM