Capacitance Manometers
Full scale 10 … 1000 Torr / mbar
The Spot CDS530D ceramic capacitance diaphragm sensor is designed for integration into the limited space in your specific vacuum instruments and systems.
The dual miniature sensor offers a high accuracy in a wide measurement range and the alumina ceramic cells and the weldable stainless steel feedthrough are all alumina coated. The sensor electronics provides a digital SPI interface for easy integration.
The sensor features a fast data cycle time for instant response to pressure changes, outstanding repeatability and long-term stability.
Advantages
- The dual miniature sensor offers a high accuracy in a wide measurement range
- Wide range, high precision
- Excellent repeatability and long-term stability
- Sensor electronics with SPI interface for easy integration
- Welded custom flange for integration of calibrated sensor
- Fast response time
Brochures & Data Sheets
SpotTM CDS530D Data Sheet