ATM to Ultra High Vacuum Gauge
The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10-9 mbar to atmosphere (3.8 x 10-9 Torr to atmosphere).
Combining technologies into one single compact unit with one logarithmic analogue out put signal significantly reduces the complexity of installation, setup and integration.
Advantages
- Combination gauge – Inverted Magnetron & Pirani
- Wide measurement range from 5 x 10-9 mbar to atmosphere
- No filament to burn out
- Excellent ignition properties
- Easy to clean
- FPM or metal-sealed feedthrough
- LED indicator for high voltage on
- Logarithmic analog output signal
Typical applications
- High vacuum pressure monitoring
- Base pressure for evaporation and sputtering systems
- General vacuum measurement and control in the medium and high vacuum range
Part Number
| MPG400 FPM sealed | |
| Part Number | Description |
| 351-010 | MPG400 FPM sealed, DN 25 ISO-KF |
| 351-011 | MPG400 FPM sealed, DN 40 ISO-KF |
| 351-012 | MPG400 FPM sealed, DN 40 CF-F |
| MPG401 metal-sealed | |
| Part Number | Description |
| 351-020 | MPG401 metal sealed, DN 25 ISO-KF |
| 351-021 | MPG401 metal sealed, DN 40 ISO-KF |
| 351-022 | MPG401 metal sealed, DN 40 CF-F |
| 351-023 | Magnetic shield |
Brochures & Data Sheets
MPG400/401 Inverted Magnetron/Inverted Magnetron Pirani Gauge Data Sheet