Making Excellence Repeatable
Protect and Grow Your Profit with Precision Rate and Thickness Monitoring
IMM-100 is a deposition monitor built with ModeLock technology to maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise.
With the oscillator built-in IMM-100 can be easily integrated into an EtherCAT system with minimal hardware and footprint. This powerful and precise measurement monitor is sure to bring a new level of performance to your process.
Features
- INFICON ModeLock technology provides the longest crystal life and ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
- Maximize yield with the best QCM thickness measurement possible
- Single channel rate and thickness monitor without unnecessary added features to minimize cost
- ±0.0035 Hz over 100 ms sample
- EtherCAT communications for seamless integration
- Compact size to minimize integration costs by saving tool real estate
- Expert application support, able to discuss unique application needs and give greater support than the competition
- RoHS compliant
Typical Applications
- OLED Applications
Brochures & Data Sheets
IMM-100 Thin Film Deposition Monitor Brochure