INFICON offers a variety of Quartz Crystal Monitor (QCM) sensor feedthroughs to accommodate many QCM sensor and chamber configurations.
CF40 (2.75 in. ConFlat®) and 2.54 cm (1 in.) bolt style feedthroughs are available with various combinations of electrical connections, water cooling, and air tubes. INFICON feedthroughs may also be equipped with Ultra-Torr O-ring compression fittings for easy installation and sensor length adjustment. Other feedthrough styles may be available on request (KF40, etc), so contact INFICON with your feedthrough needs.
Unless noted, a typical feedthrough electrical connection consists of a coaxial BNC connector on the atmosphere side and a Microdot® connector on the vacuum side. This style of electrical connection is meant for use with in-vacuum cable sensors such as INFICON Front Load single, Front Load dual, Sputtering, CrystalSix, and Crystal 12 sensors.
Note: Feedthrough water and air tubes are 4.8 mm (3/16 in.) OD.
Sensor Type
Quick reference for feedthrough requirements and part numbers based on sensor type
| Requirements | Part Number | |||||
| Sensor Type | Number of Coax | Number of Tubes | CF40 | CF40 with Ultra-Torr | 2.54 cm (1 in.) Bolt | 2.54 cm (1 in.) Bolt with Ultra-Torr |
| Single | 1 | 2 | 002-043 | 206-878-G2 | 002-042 | 750-624-G1 |
| Single with Shutter | 1 | 3 | 750-685-G1 | 750-685-G2 | 750-030-G1 | Contact Factory |
| Dual | 2 | 3 | 002-080 | 206-890-G2 | 750-707-G1 | Contact Factory |
| CrystallSix or Crystall 12 | 1 | 3 | 750-685-G1 | 750-685-G1 | 750-030-G1 | Contact Factory |
| CrystallSix or Crystall 12 with shutter | 1 | 4 | 750-683-G1 | N/A | Contact Factory | N/A |
Features
- 2.54 cm (1 in.) bolt or CF40 (2.75 in. ConFlat®) styles available
- Available Ultra-Torr O-ring compression fittings
- Custom feedthrough configurations available
- Other feedthrough styles available on request