Capacitance Manometers
45°C temperature controlled, full scale 0.01 … 1000 Torr / mbar
INFICON Stripe high-speed Capacitance Diaphragm Gauges are the fastest, highly accurate vacuum measurement instruments available. With a less than 2 ms response time combined with the EtherCAT fieldbus interface it opens up a total new field of applications.
The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability.
Stripe comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products.
INFICON Stripe using an innovative heating concept, which provides a cool to the touch surface, and its unique speed capabilities,enabling an unprecedented productivity increase, making it the most advanced vacuum instrument of its kind.
Stripe CDG045Dhs is a proud winner of the prestigious 2014 R&D 100 Award!
Advantages
- High productivity – Faster than 2 ms response time (FS > 50 mTorr)
- Flexible integration – EtherCAT fieldbus
- Long lifetime – Proven ceramic sensor
- Forget recalibration – 90 ppm/year full scale stability
Typical applications
- Atomic layer deposition
- High speed process control
- PVD, CVD, Etch
- General high temperature vacuum applications
Part Number
Brochures & Data Sheets
Stripe® CDG045Dhs & CDG100Dhs High Speed Vacuum Gauge Brochure
Vacuum Instrumentation with EtherCAT. Brochure
Stripe® CDG045Dhs Data Sheet