Medium to Ultra High Vacuum Single Gauge
For applications that require stand-alone hot ion gauge technology, the Trigon™ family includes the single technology Bayard-Alpert Hot Ion Gauge BAG552.
The BAG552 is designed for vacuum measurement of gases in the pressure range 5 × 10-10 … 2 x 10-2 mbar. The supported dual filament offers superior accuracy, repeatability and longevity. The BAG552 can also be operated in conjunction with the INFICON Vacuum Gauge Controller series VGC501, VGC502, VGC503.
VacXplor™ Software
VacXplor, our modular user software is designed to enhance your experience with INFICON Trigon Gauges. VacXplor offers a unified interface, dynamic data visualization, and advanced customization options, all without the need for administrator rights for installation.
Advantages
- Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
- 2 filaments for Bayard-Alpert system
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Extended bakeability due to removable calibration data chips
- Set point relays
- Bright & big OLED display (90° rotateable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes
- Industrial coating
- General vacuum measurement and control on systems in the high to ultra high vacuum range
Part Number
Part Number
| Part Number | Description |
| 352-420 | BAG552 Spare sensor head, 25KF |
| 352-421 | BAG552 Spare sensor head, 40CF |
Brochures & Data Sheets
Trigon™ Hot Ion Single & Combi Vacuum Gauges Brochure
Vacuum Instrumentation with EtherCAT. Brochure
Trigon™ BAG552 SingleGauge Bayard-Alpert Hot Ion Gauge Data Sheet