BPG402-Sx Hot Ionization Gauges

ATM to Ultra High Vacuum Gauge

Choose the BPG402-S with two yttrium oxide coated iridium filaments for affordable and repeatable process to base pressure measurements in one economical package. Sensing elements with on-board calibration data guarantees high reproducibility when exchanging sensors.

Also available with the EtherCAT digital interface!

Advantages

• Extremely wide measurement range from 5×10^-10 mbar to atmosphere (3.8×10^-10 Torr to atmosphere)
• Excellent repeatability in the process pressure range from 10^-8 … 10^-2 mbar of 5%
• Pirani interlock protects the filament from premature burnout
• Two long-life yttrium oxide coated iridium filaments
• Optional graphic display and Fieldbus interfaces available
• Automatic high vacuum Pirani adjustment reduces operator interventions
• Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
• RoHS compliance

Typical applications

• Pressure measurement in semiconductor process and transfer chambers
• Industrial coating
• General vacuum measurement and control in the low to ultra high vacuum range

Part Number

Part Number	Description
353-570	BPG402-S DN 25 ISO-KF
353-571	BPG402-S DN 40 CF-R
353-572	BPG402-S LCD, DN 25 ISO-KF
353-573	BPG402-S LCD, DN 40 CF-R
353-578	BPG402-SL long tube DN 40 CF-R
353-574	BPG402-SP PBus, DN 25 ISO-KF
353-575	BPG402-SP PBus, DN 40 CF-R
353-576	BPG402-SD DNet, DN 25 ISO-KF
353-577	BPG402-SD DNet, DN 40 CF-R
353-590	BPG402-SE ECAT, DN 25 ISO-KF
353-591	BPG402-SE ECAT, DN 40 CF-R
353-596	BPG402-SE ECAT, DN 25 ISO-KF
353-597	BPG402-SE ECAT, DN 40 CF-R

Brochures & Data Sheets

Hot Ion Vacuum Gauges Brochure

Vacuum Instrumentation with EtherCAT. Brochure

BPG402-S Bayard-Alpert Pirani Gauge Data Sheet

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