ATM to Ultra High Vacuum TripleGauge®
The INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge (TripleGauge®), BCG450, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5×10-10 to 1500 mbar (3.75×10-10 to 1125 Torr).
The BCG450 is designed to take the place of three sensors (hot ion, convection enhanced Pirani and vacuum switch), thus reducing cost and valuable tool space.
Also available with PROFINET digital interface.
Advantages
- BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
- Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
- Pirani interlock protects the hot filament from premature burnout
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
- Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
- Optional graphic display and Fieldbus interfaces available
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor process, transfer and loadlock chambers
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
Part Number
| Part Number | Description |
| 353-550 | BCG450 DN 25 ISO-KF |
| 353-551 | BCG450 DN 40 CF-R |
| 353-552 | BCG450 LCD, DN 25 ISO-KF |
| 353-553 | BCG450 LCD, DN 40 CF-R |
| 353-554 | BCG450-SP PBus, DN 25 ISO-KF |
| 353-556 | BCG450-SP PBus, DN 40 CF-R |
| 353-557 | BCG450-SD DNet, DN 25 ISO-KF |
| 353-558 | BCG450-SD DNet, DN 40 CF-R |
| 353-592 | BCG450-SE ECAT, DN 25 ISO-KF |
| 353-593 | BCG450-SE ECAT, DN 40 CF-R |
| 353-598 | BCG450-SE ECAT, DN 25 ISO-KF |
| 353-599 | BCG450-SE ECAT, DN 40 CF-R |
| 353-517 | BCG450-PN PROFINET, DN 25 ISO-KF |
| 353-518 | BCG450-PN PROFINET, DN 40 CF-R |
Brochures & Data Sheets
Hot Ion Vacuum Gauges Brochure
Vacuum Instrumentation with EtherCAT. Brochure
TripleGauge® BCG450 Bayard-Alpert Pirani Capacitance Diaphragm Gauge Data Sheet
More Flexibility. Better Stability.
Sliding emission mode, removable calibration chip, galvanic isolated electronics, optional OLED display (90° rotatable), and more.