ATM to Ultra High Vacuum Gauge
The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere).
Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG400 for affordable and repeatable process to base pressure measurements in one economic package.
Advantages
- Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
- Long-life yttrium oxide coated iridium filament
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
- RoHS compliance
- General vacuum measurement and control in the low to ultra high vacuum range
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
Part Number
| Part Number | Description |
| 353-500 | BPG400 DN 25 ISO-KF |
| 353-501 | BPG400 LCD, DN 25 ISO-KF |
| 353-502 | BPG400 DN 40 CF-R |
| 353-503 | BPG400 LCD, DN 40 CF-R |
| 353-505 | BPG400-SP PBus, DN 25 ISO-KF |
| 353-506 | BPG400-SP PBus, DN 40 CF-R |
| 353-507 | BPG400-SD DNet, DN 25 ISO-KF |
| 353-508 | BPG400-SD DNet, DN 40 CF-R |
Brochures & Data Sheets
Hot Ion Vacuum Gauges Brochure
BPG400 Bayard-Alpert Pirani Gauge Data Sheet