Capacitance Manometers
Full scale 0.1 … 1000 Torr / mbar
INFICON temperature compensated Edge CDG025D2 with EtherCAT Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments.
The proven temperature compensated , corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability.
Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products.
Advanced electronics offer a wide range of configurable signal conditioning for all applications with EtherCAT fieldbus interface.
Advantages
- Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
- Easy one push button or remote signal zero command, zero offset adjustable
- Diagnostic port for quick service and maintenance
- Corrosion resistant ceramic sensor
- Excellent long term signal stability
- Temperature compensated
- Sensor protected from contamination
- Compliance & standards: CE, EN, UL, SEMI, RoHS
Typical applications
- Etch, PVD and other semiconductor production processes
- Data storage and display manufacturing equipment
- Industrial vacuum equipment
- General high accuracy pressure measurement
Part Number
Brochures & Data Sheets
Edge® CDG025D2, CDG045D2, CDG100D2 High precision Vacuum Gauge Brochure
Vacuum Instrumentation with EtherCAT. Brochure
Edge® CDG025D2 with EtherCAT. Data Sheet