ATM to Ultra-High Vacuum Gauge
The INFICON Gemini® Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement applications. While Gemini MPG50x combines two sensor systems in one small device to measure from atmosphere down to 1×10– 9 mbar, the Gemini MAG50x is a pure cold cathode sensor System (without Pirani element) which covers the range from 1×10-2 mbar to 1×10– 9 mbar.
The patented ultra-low magnetic stray field design opens up a whole new range of applications. A unique interchangeable dual chamber sensor unit avoids cleaning cycles and reduces maintenance, making Gemini the most robust and economical vacuum gauge of its kind.
Gemini Cold Cathode and combination comes with fully integrated digital electronics, providing ultimate flexibility for system integration. The Cold cathode and Pirani combination version (MPG) option provides seamless transition, reliability, practicality and flexibility across wide ranging applications.
MAG and MPG Gemini are now available with PROFINET, EtherCAT fieldbus and setpoints as MAG55x and MPG55x.
For corrosive applications we suggest to use the ceramic coated version MxG5x4. Feedthrough and Pirani inside the sensor head are fully ceramic coated for enhanced corrosion resistance.
Geminiv® Cold Cathode and combination sensor`s come with fully integrated digital electronics, providing ultimate flexibility for System Integration.
Both, cold cathode and Pirani combination sensor Option provide seamless Transition, reliability, proactivity and flexibility across wide ranging applications.
Advantages
- Long lifetime in harsh environments
- Low magnetic stray field
- Reliable fast ignition
- Fastest maintenance – replaceable insert
- Compact size – easy to integrate
- Corrosion proof feed-through & sensor element
- Selectable measuring current
- 2 relay setpoints (in conjunction with MxG55x PROFINET and EtherCAT)
- PROFINET, EtherCAT and RS232/ RS485 digital interace
Typical applications
- Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
- General vacuum measurement – industrial furnaces, architectural glass, semiconductor, Refrigeration/ air conditioning and production laboratory`s
- Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical and high energy physics.
Part Number
| MAG5xx | |
| Part Number | Description |
| 211-098 | Centering ring with fine filter DN 25 KF |
| 351-550 | MxG50x Ignition tool set |
| 211-113 | Centering ring with baffle DN 25 KF |
| 353-512 | Baffle for DN 25 KF flange |
| MPG5xx | |
| Part Number | Description |
| 211-098 | Centering ring with fine filter DN 25 KF |
| 351-550 | MxG50x Ignition tool set |
| 211-113 | Centering ring with baffle DN 25 KF |
| 353-512 | Baffle for DN 25 KF flange |
Part Number
Tutorial Videos
How to replace the sensor?
How to properly replace the ionization chamber and the ignition aid?
Brochures & Data Sheets
Gemini™ Cold Cathode Ionisation Vacuum Gauge Brochure
Vacuum Instrumentation with EtherCAT. Brochure
Gemini® MPG5xx / MAG5xx Inverted Magnetron/Inverted Magnetron Pirani Gauge Data Sheet