IC6
Thin Film Deposition Controller
Provides exceptional value by combining the best performance, quality, and features of any other quartz crystal controller.
- INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
- Auto Z improves thickness accuracy by automatically determining the Z-ratio as material is deposited
- Codeposition of up to six sources simultaneously
- USB data storage for screen shots, recipe storage, and data logging
Cygnus® 2
Thin Film Deposition Controller
Provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your OLED process.
- INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
- Auto Z improves thickness accuracy by automatically determining the Z-ratio as material is deposited
- Up to six sources can be controlled simultaneously, independently or in any combination by one Cygnus 2, relieving the need for two or three controllers
- USB data storage for screen shots, recipe storage, and data logging
XTC/3
Thin Film Deposition Controller
Advanced, Affordable Rate Control for Single and Multiple Layer Processes.
- Available in single-layer and multiple-layer models
- Patented ModeLock technology prevents film thickness errors caused by mode-hopping
- Supports INFICON Crystal 12®, Crystal Six®, and dual sensor automatic crystal switching for maximum productivity
- XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, 2 sensors, and two sources
SQC-310
Thin Film Deposition Controller
Highly Accurate Sequential or Codeposition Control.
- Bright, color LCD display – available in English or Chinese
- Standard RS-232 and USB (RS-232 and Ethernet optional)
- Easy setup and operation with a “Quick Setup” Menu, 6 context-sensitive push buttons, and convenient parameter setting knob
- Windows® program for developing, testing, and downloading processes, and for logging instrument data to your PC for process analysis and quality control
IQM-233
Thin Film Deposition Controller
Low-Cost Deposition Control on a PCI Express Card.
- PCI Express, install multiple cards in a PC
- Three sensor inputs, three control outputs per card
- Easy PLC integration to add I/O capabilities
- Codeposition of multiple sources
Guardian™ EIES CONTROLLER
Thin Film Deposition Controller
Simultaneous Control of Up to Eight Materials using Electron Impact Emission Spectroscopy.
- Monitor and control simultaneous deposition of up to 8 materials
- Deposition rates from 0.1 to 10,000 Å/s
- Integrated EIES and QCM thin film process control
- 12 relay outputs and 12 digital inputs