ATM to Ultra High Vacuum Dual Gauge
For applications that require a measurement range from UHV (5 x10-10) down to ATM (1000 mbar), the Trigon™ family includes the dual technology BPG552 gauge. BPG552 consists of an Bayard-Alpert Hot Ionization sensor element and a classical, robust and reliable Pirani sensor element. The supported Bayard-Alpert dual filament offers superior accuracy, repeatability and longevity.
VacXplor™ Software
VacXplor, our modular user software is designed to enhance your experience with INFICON Trigon Gauges. VacXplor offers a unified interface, dynamic data visualization, and advanced customization options, all without the need for administrator rights for installation.
Advantages
- Dual Gauge (2 sensing elements) for a wide measurement range, cost reduction & space savings
- 2 filaments for Bayard-Alpert system
- Pirani interlock protection to avoid premature filament burnout
- Automatic high vacuum Pirani adjustment reduces operator interventions
- Galvanic isolated electronics to avoid electric stray current
- Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
- Extended bakeability due to removable calibration data chips
- Set point relays
- Bright & big OLED display (90° rotatable) with user interface
- Analog output, RS232C serial interface, EtherCAT®
- Usable in conjunction with VGC50x Controller series
- Backwards compatible to BPG402
- RoHS compliance
Typical applications
- Pressure measurement in Semiconductor processes
- Industrial coating
- General vacuum measurement and control on systems in the low to ultra high vacuum range
Part Number
Part Number
| Part Number | Description |
| 354-420 | BPG552 Spare sensor head, KF25 |
| 354-421 | BPG552 Spare sensor head, CF40 |
Brochures & Data Sheets
Trigon™ Hot Ion Single & Combi Vacuum Gauges Brochure
Vacuum Instrumentation with EtherCAT. Brochure
Trigon™ BPG552 DualGauge Bayard-Alpert Pirani Gauge Data Sheet