Medium to Ultra High Vacuum Gauge
The INFICON single Bayard-Alpert Hot Ion Gauge BAG402 covers a wide measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr). Choose the INFICON BAG402 for affordable and repeatable process to base pressure measurements in a compact active gauge package.
The unique, supported dual filaments offer superior accuracy, long term stability and longevity.
Advantages
- Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
- Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
- Overpressure detection protects the filament from premature burnout
- Two long-life yttrium oxide coated iridium filaments
- Automatic emission current selection reduces control complexity
- Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
- RoHS compliance
Typical applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
Part Number
| 353-600 | BAG402 DSUB9 KF25 |
| 353-601 | BAG402 DSUB9 CF40 |
Brochures & Data Sheets
BAG402 Bayard-Alpert Hot Ion Gauge Data Sheet
More Flexibility. Better Stability.
Sliding emission mode, removable calibration chip, galvanic isolated electronics, optional OLED display (90° rotatable), now also compatible with VGC50x and more.