Augent® OPG550
Dual Gauge for Optical Gas Analysis and Total Pressure Measurement.
Provide fast real-time leak detection, gas analysis, and process monitoring for semiconductor manufacturing and other markets.
- High speed leak detection allows chamber leak test
- Smart algorithm for easy integration
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
Quantus® HP100
Optical Gas Analyzers
Provide real-time leak detection, endpoint detection and process monitoring for cutting-edge semiconductor manufacturing processes and other gas analysis applications.
- Operating range from 1 Torr up to 450 Torr
- Superior detection limit < 1 ppm
- Long-term reliability: no pumps required
- Easy installation using a standard KF25 connection
Quantus® LP100
Optical Gas Analyzers
Provide real-time leak detection and endpoint detection for critical process environments.
- Operating range of 10 mTorr to 1 Torr
- Excellent detection limits down to low ppm levels
- Long-term reliability: no pumps required
- Easy installation using a standard KF25 connection
