Fast, Field-Ready Process Monitoring System
Performance, Reliability, and Versatility
INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.
Transpector CPM 3 provides proven return on investment to our partners through:
- Industry Leading Measurement Technology
- Robust and Adaptive Architecture
- Ease of Maintenance
- Superior Product Support
Features
- Residual Gas Analyzer for ALD, Etch, CVD and 300 mm Degas—enables real-time process monitoring and analysis
- ALD-Ready with 1.8 ms per point (555 points per second) measurement speed
- Field-proven durability and reliability in the most demanding CVD and Etch applications
- Application Integration—Transpector CPM becomes a powerful process monitoring and diagnostics tool when integrated with FabGuard software and supported by INFICON world-class applications experts
- Compact size—allows for easy integration into production semiconductor equipment
- Hexblock™ with up to three pressure inlets and reduced surface area to minimize surface reactions and response times
- Capacitance Diaphragm Gauge (CDG)—CDG allows user to monitor the process pressure and automatically protect the system from pressure excursions
- Automated calibration—ensures long-term data stability and accuracy for sensor to sensor and tool to tool chamber matching
Brochures & Data Sheets
Transpector® CPM Fast, Field-ready Process Monitoring System Brochure