Setpoint 3 mbar below ambient
The INFICON Vacuum Switch VSA100A is used as a safety switch in vacuum systems. For example, to automatically interrupt the gas supply when venting vacuum systems with a purge gas at a pressure of 6 mbar below atmospheric pressure.
At a differential pressure of 6 mbar resp. return switching pressure of 3 mbar below atmospheric pressure, an elastic diaphragm actuates a changeover contact which in turn may be used to switch directly any ancillary equipment.
Advantages
- Reliable and budget-priced vacuum switch
- High life time
- Rugged design
- Easy to integrate
- IP 44 protection
Typical applications
- Control of load lock chambers
- Safety shutdown of vacuum systems
Part Number
| Part Number | Description |
| 399-001 | VSA100A Vacuum Switch DN16KF, 3m Cable |
Brochures & Data Sheets
VSA100A Vacuum Switch Data Sheet