ATM To Medium Vacuum Gauge
The INFICON Pirani Standard Gauges, PSG500, PSG502-S, PSG510-S and PSG512-S, employ the most advanced digital Pirani technology available in themarketplace.
The rugged stainless steel sensor cell and compact design qualify them for use on semiconductor systems and for standard applications, such as fore vacuum lines.
Advantages
- Easy push button ATM and HV adjustment
- Space saving rugged design
- Aluminum housing
- Mounts in any orientation
- Stainless steel measuring cell with metal-sealed feedthrough
- Logarithmic signal output for easy integration
- 10 bar absolute overpressure with threaded connections
- 250 °C bakeable version
- Nickel filament option for corrosive applications
- Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
- Optional setpoints
- RoHS compliance
Typical applications
- Controlling high vacuum ionization gauges
- Fore vacuum pressure monitoring
- Safety circuits in vacuum systems
- General vacuum measurement and control in the fine and rough vacuum range
Part Number
| PSG500 tungsten | |
| 350-060 | PSG500 DN 16 ISO-KF. |
| 350-061 | PSG500 1/8″ NPT |
| 350-062 | PSG500 DN 16 CF-R |
| 350-063 | PSG500 1/2″ Tube |
| 350-064 | PSG500 8-VCR (1/2″) |
| 350-065 | PSG500 4-VCR (1/4″) |
| 350-066 | PSG500 7/16-20 UNF |
| 350-067 | PSG500 DN 16 ISO-KF, ext. body |
| 350-068 | PSG500 DN 16 CF-R, ext. body |
| PSG500-S tungsten, setpoints | |
| 350-080 | PSG500-S DN 16 ISO-KF |
| 350-081 | PSG500-S 1/8″ NPT |
| 350-082 | PSG500-S DN 16 CF-R |
| 350-083 | PSG500-S 1/2″ Tube |
| 350-084 | PSG500-S 8-VCR (1/2″) |
| 350-085 | PSG500-S 4-VCR (1/4″) |
| 350-086 | PSG500-S 7/16-20 UNF |
| 350-087 | PSG500-S DN 16 ISO-KF, ext. body |
| 350-088 | PSG500-S DN 16 CF-R, ext. body |
| PSG502-S nickel, setpoints | |
| 350-140 | PSG502-S DN 16 ISO-KF |
| 350-141 | PSG502-S 1/8″ NPT |
| 350-142 | PSG502-S DN 16 CF-R |
| 350-143 | PSG502-S 1/2″ Tube |
| 350-144 | PSG502-S 8-VCR (1/2″) |
| 350-145 | PSG502-S 4-VCR (1/4″) |
| 350-146 | PSG502-S 7/16-20 UNF |
| 350-147 | PSG502-S DN 16 ISO-KF, ext. body |
| 350-148 | PSG502-S DN 16 CF-R, ext. body |
| PSG510-S tungsten, setpoints, ceramic feedthroughs | |
| 350-200 | PSG510-S DN 16 ISO-KF |
| PSG512-S nickel, setpoints, ceramic feedthroughs | |
| 350-300 | PSG512-S DN 16 ISO-KF |
Brochures & Data Sheets
The Pirani Family Brochure
PSG50x/-S, PSG51x-S, Pirani Standard Gauge Data Sheet