IC6 Thin Film Deposition Controller

Making Excellence Repeatable

The IC6 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of 0.00433 Å/s every 1/10 second. No other quartz crystal controller has the performance, quality, and features of the IC6, allowing you to make excellence repeatable.

Features

• INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
• Auto Z improves thickness accuracy by automatically determining the Z-ratio as material is deposited
• Codeposition of up to six sources simultaneously
• Color TFT LCD display makes it easy to see what’s going on with your process
• +/-0.0035 Hz over 100ms sample
• USB data storage for screen shots, recipe storage and data logging
• Powerful I/O with flexibility to integrate into simple or complex systems (using expandable Inputs (28) and Outputs (24 Relays, 14 TTL outputs), and use of logic functions (100 logic statements)
• 6 DAC outputs standard, 6 additional optional for source control, rate or thickness monitoring
• Can accommodate up to 50 processes of 200 layers each and processes can be linked together for a maximum of 10,000 layers
• Multiple sensor averaging for up to 8 sensors
• 4 meter XIU option provides the ability to use long in-vacuum sensor cables for large systems
• Optional Ethernet communications
• Optional IC6 Configuration Editor Software (part number 781-620-G1) – LabVIEW® based Windows® software that allows for offline creation and editing of IC6 configuration files and converts IC/5 configuration files to IC6 format.
• RoHS compliant

Typical Applications

• High End Optical Coating

Brochures & Data Sheets

IC6 Thin Film Deposition Controller for Optical Applications Brochure